| 格mm | 測量面對基礎的垂直度 | 測量面平面度或直線度 | 基準平面度或直線度 | ||||||
| 精度等級um | |||||||||
| 0 | 1 | 2 | 0 | 1 | 2 | 0 | 1 | 2 | |
| 300×200 | 6 | 11 | 22 | 2 | 4 | 7 | 3 | 6 | 11 |
| 400×300 | 7 | 12 | 25 | 2 | 4 | 8 | 3.5 | 7 | 12 |
| 500×350 | 8 | 15 | 30 | 2.5 | 5 | 10 | 4 | 8 | 15 |
| 630×400 | 9 | 18 | 35 | 3 | 6 | 12 | 4.5 | 9 | 18 |
| 800×500 | 10 | 20 | 40 | 3 | 7 | 14 | 5 | 10 | 20 |
| 1000×630 | 12 | 25 | 50 | 4 | 8 | 16 | 6 | 12 | 25 |
| 1250×800 | 15 | 30 | 60 | 5 | 10 | 20 | |||
